Persons in Clean Rooms

SinceProjectName
03/27/15 01:40pmmcelectMinkyu Cho
03/27/15 01:46pmjyliJianye Li
03/27/15 02:09pmjlelectJaeseong Lee
03/27/15 02:12pmmdvdwMatthew Dwyer
03/27/15 02:34pmmunhoMunho Kim
03/27/15 03:38pmrfelecSang June Cho
03/27/15 03:41pmsyiSoongyu Yi
03/27/15 03:51pmupatelUmeshkumar Patel

Equipment Status


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RoomNameDescriptionWho
in_use
3022Image captureNikon & Wild optical microscopesJianye Li
3023SU8 Solv BenchSU8 Solvent BenchJaeseong Lee
3023New MJB3 alignerNew MJB-3Jaeseong Lee
3023Spinner 2--SU8General spin recipesJaeseong Lee
3023Litho Solv Bench1165 RemoverMinkyu Cho
3026PT770 ICPPT 770 ICP Metals EtchMatthew Dwyer
3026Unaxis 790Unaxis 790Minkyu Cho
3027III-V Wet BenchIII-V Wet BenchMinkyu Cho
3027Chem Solvent BenLift-off and Hot PlatesMinkyu Cho
3034MRL Tube 2General Use 1050 Steam OxSoongyu Yi
3034MRL Tube 4AnnealMunho Kim
3034EV 801 BonderEV801 Wafer BonderMunho Kim
3035Polymer OvenPolymer ovenMunho Kim
down
3030CVC SputtererMagnetron sputter depositionHal Gilles
maintenance

Fri Mar 27, 2015 3:52:02 pm