Persons in Clean Rooms

SinceProjectName
04/17/14 08:40amkstaffKurt Kupcho
04/17/14 08:44amthcgrapheneTzu-Hsuan Chang
04/17/14 08:54ammbeckMatthew Beck
04/17/14 09:30amjrsanchezJose Sanchez-Perez
04/17/14 09:34amlee338Juhwan Lee
04/17/14 09:57amncdeviceNamki Cho
04/17/14 10:08amlqstaffQuinn Leonard
04/17/14 10:09ampbqubitsEdward Leonard
04/17/14 10:15amphotonics2Zhenyang Xia
04/17/14 10:19amcwilenChris Wilen
04/17/14 10:22amhgstaffHal Gilles

Equipment Status


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RoomNameDescriptionWho
in_use
3022Nikon stepperI-line step & repeat alignerEdward Leonard
3023SU8 Solv BenchSU8 Solvent BenchEdward Leonard
3023Old MJB3 alignerOld MJB-3Juhwan Lee
3023New MJB3 alignerNew MJB-3Namki Cho
3023Spinner 1-- PRGeneral spin recipesJuhwan Lee
3023Spinner 2--SU8General spin recipesNamki Cho
3023Spinner 3--PRGeneral spin recipesEdward Leonard
3023HMDS primerPR primer hotplateEdward Leonard
3026Unaxis 790Unaxis 790Matthew Beck
3027Chem Solvent BenLift-off and Hot PlatesZhenyang Xia
3027Piranha BenchPiranha BenchZhenyang Xia
3030Denton RF SputteDenton Discovery 24Tzu-Hsuan Chang
3034MRL Tube 4AnnealJose Sanchez-Perez
3035Polymer OvenPolymer ovenMunho Kim
down
3026Trion MinilockTrion MinilockQuinn Leonard
3026STSSTS Silicon MEMS ICPKurt Kupcho
3030YES Plasma AsherPR dry stripper / asherQuinn Leonard
3034MRL Tube 61200C AnnealsDan Christensen
3034Tystar LTOLow Temp Oxide DepositionHal Gilles
maintenance

Thu Apr 17, 2014 10:26:28 am